Simulation and empirical investigation of micro-electro-mechanical piezoresisitive pressure sensor package based on the requirements of petrochemical industry. (English)

In this paper, a designed micro-electromechanical pressure sensor package is studied analytically and empirically. This package includes a piezoresistive micro-electromechanical pressure sensor, printed circuit board (PCB), the capacitance LCD. First, a mathematical model for the sensor is presented, then the behavior of the sensor is simulated using COMSOL computer software which is based on finite element method. As a consequence, the sensitivity of the micro-electromechanical pressure sensor and output voltage are determined. It should be noted that an Xducer resistor type is adopted in this study. In addition to static and modal analyses of the sensor, the effects of geometrical parameters on output voltage have also been studied. Simulation results show that by changing the size and position of the resistor, as well as the size and thickness of the diaphragm, the sensitivity of the sensor can alter. Then, with the construction and placement of components on printed circuit boards, the package has been prepared and tested in a laboratory. The experimental results of the package show that the error of the devised package in measuring the pressure is less than 0.5 percent. This pressure sensor package is capable of measuring the pressure with the mentioned accuracy within the range of 0-6 bar. For verification, the empirical results are presented at the end of the study. The package can be used according to the requirements of the petrochemical industry in measuring gas pressure of specific storage tanks and pressure vessels in FANAVARN petrochemical company. [ABSTRACT FROM AUTHOR]

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