Permittivity Characterization of Ferroelectric Thin-Film Hafnium Zirconium Oxide Varactors up to 170 GHz
In: Device Research Conference (DRC); (2023-06-25) S. 1-2
Online
Konferenz
Zugriff:
Titel: |
Permittivity Characterization of Ferroelectric Thin-Film Hafnium Zirconium Oxide Varactors up to 170 GHz
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Autor/in / Beteiligte Person: | Abdulazhanov, S. ; Le, Q. H. ; Huynh, D. K. ; Lehninger, D. ; Kampfe, T. ; Gerlach, G. |
Link: | |
Quelle: | Device Research Conference (DRC); (2023-06-25) S. 1-2 |
Veröffentlichung: | 2023 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-2310-8 (print) |
ISSN: | 2640-6853 (print) |
DOI: | 10.1109/DRC58590.2023.10187025 |
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