Low temperature process below 170 °C for hydrophilic and hydrophobic micro patterns
In: Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII); (2013-06-01) S. 1111-1114
Online
Konferenz
Zugriff:
Titel: |
Low temperature process below 170 °C for hydrophilic and hydrophobic micro patterns
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Autor/in / Beteiligte Person: | Nakagami, C. ; Tonomura, W. ; Kaizuma, Y. ; Konishi, S. |
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Quelle: | Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII); (2013-06-01) S. 1111-1114 |
Veröffentlichung: | 2013 |
Medientyp: | Konferenz |
ISBN: | 978-1-4673-5983-2 (print) |
ISSN: | 2159-547X (print) ; 2164-1641 (print) |
DOI: | 10.1109/Transducers.2013.6626966 |
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